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A3: High temperature materials

P.Mele1, S.Saini1, H.Honda1, K.Matsumoto2, K.Miyazaki2,  A.Ichinose3, L.Molina4, P.E.Hopkins5
1ISSD, Hiroshima Univ., 2Kyushu Inst. of Technol.,3CRIEPI, 4Tech. Univ. of Darmstadt,5Univ. of Virginia

We report on high thermoelectric performance of 2% Al-doped ZnO (AZO) thin films fabricated by Pulsed Laser Deposition on cheap amorphous silica substrates. Dense AZO target was irradiated by Nd:YAG laser (266 nm, 10 Hz) which energy density is about 4.2 J/cm2 for deposition period of 30 min at Tdep = 300°C, 400°C, 500°C and 600°C keeping an oxygen pressure of 27 Pa. All the films are fully c-axis oriented, independently of Tdep. TEM analysis reveals columnar growth and very sharp interface between substrate and films. Electric conductivity (σ) and Seebeck coefficient (S) were evaluated in the interval T = 300 - 600 K. σ presents a clear semiconducting behaviour. S sign is always negative, confirming the n-type conduction, and his absolute value increases with Tdep. Best performance was obtained on the film deposited at 300 °C, with σ = 923 S/cm, S = -111 μV/K and very large power factor S2σ = 1.2 W/m×K2at 600K, twofold than for AZO film deposited on SrTiO3 single crystal under same experimental conditions [1]. The reason can be given by the lowest stress of thin films deposited on fused silica [2]. Thermal conductivity is κ = 4.89W/m×K at 300 K. Dimensionless figure of merit ZT = (S2σ )T/ κ is calculated in the range 300-600 K using κ at 300 K [3]: ZT for thin films is always higher than for corresponding bulk material. This result is quite encouraging for the practical applications of thermoelectric oxide thin films at high temperatures.

[1] P. Mele et al, Appl. Phys. Lett. 102 (2013) 253903

[2] M Novotny et al, J. Phys. D: Appl. Phys. 45 (2012) 225101

[3] Because κ is expected to decrease with T: see for example G. S. Nolas and H. J. Goldsmid, Thermal Conductivity: Theory, Properties and Applications, Kluwer Academic/Plenum Publishers, 2004, p. 114